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Category International Journal
Paper Title Importance of surface modification of a microcontact stamp for pattern fidelity of soluble organic semiconductors
Journal name Journal of Micro/Nanolithography, MEMS, and MOEMS
Author Hea-Lim Park, Bo-Yeon Lee, Se-Um Kim, Jeng-Hun Suh, Min-Hoi Kim, Sin-Doo Lee
SCI N Vol 15
page 013501 Year/date 2016/01/22
Acknowledgements This work was supported in part by Samsung Display Company and BK21 Plus Program of Korea.
Keyword polydimethylsiloxane, ultraviolet ozone treatment, pattern fidelity, selective contact evaporation, 6,13-bis(triisopropylsilylethynyl)-pentacene, solution-processed organic field-effect transistor
Abstract We described the effect of the ultraviolet ozone (UVO) treatment of a polydimethylsiloxane (PDMS) stamp on the fidelity of 6,13-bis(triisopropylsilylethynyl) pentacene (TIPS-PEN) patterns produced from a TIPS-PEN/polymer blend by selective contact evaporation (SCE). During the SCE process, the TIPS-PEN in contact with the nanoporous PDMS was absorbed into the PDMS stamp, leaving out the TIPS-PEN patterns, complementary to the PDMS patterns, in the noncontact regions. For the case of the untreated, hydrophobic PDMS surface, the TIPS-PEN patterns developed initially were shrunken and eventually disappeared after 24 h due to the steady absorption of the TIPS-PEN in time. In contrast, for the UVO-treated case, the TIPS-PEN patterns were found to maintain the initial shapes over the period of 24 h since the absorption of the TIPS-PEN was limited by the hydrophilic nature of the UVO-treated PDMS. The modified PDMS surface by the UVO for 30 min yielded the highest fidelity of the TIPS-PEN patterns in both height and width. The patterned TIPS-PEN layer by the SCE was implemented into an organic field-effect transistor to demonstrate the viability of the SCE combined with the UVO treatment for solution-processed organic electronic devices.

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